Zinc oxide on silicon surface acoustic wave devices for signal processing and frequency control
Abstract
The signal processing capability of metal-zinc oxide-silicon dioxide-silicon (MZOS) convolvers was improved by utilizing the high coupling characteristics of Sezawa waves. A prototype Sezawa wave convolver was fabricated and tested to determine its efficiency and bandwidth. A 3 db bandwidth of MHz was observed along with a tuned convolution efficiency of -57 dbm. A theoretical model for interdigital transducers coupled to Sezawa waves was developed. This model explains the severe distortion of the frequency response of Sezawa mode devices having 20 finger pair interdigital transducers. A MZOS surface wave resonator designed, fabricated, and evaluated. Faco Factors influencing the Q in such devices were identified.
- Publication:
-
Ph.D. Thesis
- Pub Date:
- May 1978
- Bibcode:
- 1978PhDT........30E
- Keywords:
-
- Frequency Control;
- Metal Oxide Semiconductors;
- Signal Processing;
- Sound Waves;
- Surface Waves;
- Resonators;
- Silicon;
- Sputtering;
- Thin Films;
- Communications and Radar