Design and fabrication of thin-film microwave microcircuits
Abstract
Various aspects of the design and fabrication of hybrid integrated thin-film microwave circuits are reviewed. Particular attention is given to the effects of design and fabrication errors on the electrical properties of microstrip transmission lines. The properties of materials used as substrates, and as conducting, resistive, and dielectric films in hybrid microcircuits are discussed, and attention is given to some specific production processes.
- Publication:
-
Moscow Izdatel Sovetskoe Radio
- Pub Date:
- 1978
- Bibcode:
- 1978MIzSR.........B
- Keywords:
-
- Fabrication;
- Hybrid Circuits;
- Integrated Circuits;
- Microwave Circuits;
- Thin Films;
- Conductors;
- Dielectrics;
- Electrical Properties;
- Error Analysis;
- Metal Films;
- Microstrip Transmission Lines;
- Network Synthesis;
- Probability Density Functions;
- Rayleigh Distribution;
- Resistors;
- Substrates;
- Transistor Circuits;
- Electronics and Electrical Engineering