Exploration and monitoring of a MOS LSI technology by a test vehicle
Abstract
The paper describes a control circuit, called a test vehicle, which is used to monitor LSI manufacture. Independent tests distinguish and characterize critical stages in the manufacturing process; the relation between design rules and technology is analyzed, and process reliability is evaluated. The test procedure provides information on comparatively simple components, such as transistors, as well as complex components, such as oscillators and amplifiers.
- Publication:
-
L'Onde Electrique
- Pub Date:
- December 1978
- Bibcode:
- 1978LOEle..58..823L
- Keywords:
-
- Electronic Equipment Tests;
- Fabrication;
- Integrated Circuits;
- Large Scale Integration;
- Metal Oxide Semiconductors;
- Test Stands;
- Component Reliability;
- Electrical Measurement;
- Oscillators;
- Transistors;
- Electronics and Electrical Engineering