The use of a silicon-gate C-MOS/SOS test vehicle to evaluate technology maturity
Abstract
The use of a comprehensive test vehicle for the evaluation of the maturity of CMOS/SOS technology is demonstrated. The composition of the vehicle has permitted evaluation of such factors as the overall yield and performance of the technology, the identification of particular problems associated with the design rules, and the examination of the basic electrical parameters of the technology. In addition, the vehicle has been partitioned to facilitate ease of probing and bonding. This paper reviews the design rule and mask sequence formulation, and test vehicle design and evaluation, and presents a photomicrograph of the vehicle.
- Publication:
-
IEEE Transactions on Electron Devices
- Pub Date:
- August 1978
- DOI:
- 10.1109/T-ED.1978.19194
- Bibcode:
- 1978ITED...25..873J
- Keywords:
-
- Cmos;
- Performance Tests;
- Silicon Junctions;
- Sos (Semiconductors);
- Technology Assessment;
- Test Vehicles;
- Circuit Reliability;
- Electronic Equipment Tests;
- Gates (Circuits);
- Integrated Circuits;
- Masking;
- Thresholds;
- Electronics and Electrical Engineering