The present and foreseeable state of electronic masking machines
Abstract
Electron beam machines are used in microlithography to produce masks and to inscribe circuits directly on silicon chips. Advanced masking machines are analyzed with attention to their speed, resolution, tracing capabilities, and access modes. Present use and future trends are discussed.
- Publication:
-
Revue Technique Thomson CSF
- Pub Date:
- June 1977
- Bibcode:
- 1977RvT.....9..221P
- Keywords:
-
- Electron Beams;
- Electronic Equipment;
- Lithography;
- Masking;
- Classifications;
- Electron Guns;
- Scanning;
- Technology Assessment;
- Electronics and Electrical Engineering