Precision mechanical metrology using capacitive procedures - General principles
Abstract
Sensors and techniques used to determine electric capacitances are discussed with attention to their application to the measurement of small distances. A resolution of 0.00001 micron was obtained in one experiment, and the resolution and the precision obtained by the different techniques are examined with reference to the theoretical resolution attainable. The effects of environmental parameters on precision are examined.
- Publication:
-
Revue Francaise de Mecanique Quarterly
- Pub Date:
- December 1977
- Bibcode:
- 1977RFrMQ........9G
- Keywords:
-
- Capacitance;
- Electrical Measurement;
- Mechanical Measurement;
- Metrology;
- Amplitude Modulation;
- Distance Measuring Equipment;
- Frequency Modulation;
- Precision;
- Spatial Filtering;
- Time Functions;
- Transfer Functions;
- Instrumentation and Photography