New developments in sputter-ion pump configurations
Abstract
A new sputter-ion pump configuration is discussed. Features of this pump include (1) high throughput capability, (2) a completely closed magnetic circuit, and (3) field replaceable, water-cooled cathodes. The cylindrical pump body is constructed of a ferromagnetic material functioning as part of the vacuum envelope, but also as a return path in the magnetic circuit. The cathodes, constructed of a special Ti alloy, also serve as part of the vacuum envelope and are sealed to the pump body with crushed Cu gaskets. This new compact design affords throughput handling capabilities of pumps greater than ten times the weight. Comprehensive data for speed, throughput, and pump life are given.
- Publication:
-
Journal of Vacuum Science Technology
- Pub Date:
- February 1976
- DOI:
- 10.1116/1.568908
- Bibcode:
- 1976JVST...13..498W
- Keywords:
-
- Accelerated Life Tests;
- Design Analysis;
- Hydrogen;
- Ion Pumps;
- Sputtering;
- Cathodes;
- Ferromagnetic Materials;
- Magnetic Circuits;
- Nitrogen;
- Vacuum Systems;
- Engineering (General)