Semiconductor measurement technology
Abstract
Contents: Resistivity; dopant profiles; crystal defects and contaminants; oxide film characterization; test patterns; photolithography; epitaxial layer thickness; wafer inspection and test; interconnection bonding; hermeticity; thermal properties of devices.
- Publication:
-
Quarterly Report
- Pub Date:
- February 1975
- Bibcode:
- 1975nbs..reptU....B
- Keywords:
-
- Quality Control;
- Semiconductor Devices;
- Capacitors;
- Electrical Resistivity;
- Mathematical Models;
- Electronics and Electrical Engineering