SEM investigation of IC defects
Abstract
An investigation of integrated circuit (IC) defects was conducted using the scanning electron microscope (SEM) at the U.S. Air Force Academy. The study included two main areas of interest: thermal effects on Au-Al intermetallic formation and radiation damage to thermocompression bonds.
- Publication:
-
Final Report Air Force Academy
- Pub Date:
- June 1975
- Bibcode:
- 1975afa..rept.....C
- Keywords:
-
- Defects;
- Integrated Circuits;
- Nondestructive Tests;
- Quality Control;
- Electron Microscopes;
- Electronics;
- Intermetallics;
- Scanners;
- Electronics and Electrical Engineering