Development of a CCD image sensor, phase 1
Abstract
The results of work carried out in the development of a CCD image sensor are described. Topics included are: basic studies of buried channel technology, experiments with chip thinning, experiments with on-chip charge detecting circuitry, fabrication and optical assessment of linear arrays for both front face and back face imaging, and studies of antiblooming. From these results, consideration is given as to the feasibility of meeting target performance specifications for space imagers.
- Publication:
-
NASA STI/Recon Technical Report N
- Pub Date:
- November 1975
- Bibcode:
- 1975STIN...7620452B
- Keywords:
-
- Charge Coupled Devices;
- Imaging Techniques;
- Remote Sensors;
- Chips;
- Fabrication;
- Linear Arrays;
- Product Development;
- Semiconductors (Materials);
- Instrumentation and Photography