Advanced instrumentation for microelectronic component analysis - The state of the art and beyond
Abstract
This paper reviews and projects into the future the applications of advanced instrumentation in microelectronic component analysis. The interaction of specified stimulus and response is presented with analysis applications to give a comprehensive evaluation of the present equipment and future advances. The scanning electron microscope (SEM), energy dispersive X-ray analyzer (EDXA), scanning light photon system (SLPS), auger electron spectrometer (AES), electron spectrometer for chemical analysis (ESCA), and ion microprobe mass analyzer (IMMA) are the analytical instruments discussed.
- Publication:
-
Inventing the Model of the Future
- Pub Date:
- 1974
- Bibcode:
- 1974imf..proc..513S
- Keywords:
-
- Auger Spectroscopy;
- Electron Microscopes;
- Ion Probes;
- Mass Spectroscopy;
- Microelectronics;
- X Ray Spectroscopy;
- Electron Optics;
- Electronic Equipment Tests;
- Instrument Errors;
- Microanalysis;
- Scanning;
- Technology Assessment;
- Instrumentation and Photography