Surface measurement by microelectronics

Surface measurements on microelectronic specimens by means of a stylus type instrument are reported. The measuring equipment is described and an introduction of the relevant definitions and parameters such as profile, roughness, camber and thickness of layers are given. Surface measurements on thickfilm circuit on ceramic substrate, thinfilm circuit on glass substrate, and a semiconductor components are carried out. Profile and roughness value plus a scanning electron microscope picture or an ordinary picture are compiled for each specimen measured. Sources of error in measuring surfaces with a stylus are described and illustrated.