Porous leak evaluation and application to calibration of a high-pressure ion gauge
Abstract
- Publication:
-
Journal of Vacuum Science Technology
- Pub Date:
- October 1974
- DOI:
- 10.1116/1.1318086
- Bibcode:
- 1974JVST...11..889H
- Keywords:
-
- Calibrating;
- High Pressure;
- Ionization Gages;
- Porous Materials;
- Pressure Effects;
- Vacuum Gages;
- Flow Resistance;
- Free Molecular Flow;
- Instrument Errors;
- Ionization Cross Sections;
- Leakage;
- Mass Flow Rate;
- Molecular Weight;
- Pressure Gages;
- Sensitivity;
- Instrumentation and Photography