Progressive methods of producing microcircuits
Abstract
Several physical and technological problems are considered in relation to the use of ion and electron currents in the production of microcircuits. The topics discussed include ion and electron-beam dusting of thin films, thin film treatment using ion and electron currents, electron-beam alloying of semiconductors, electron-beam welding, and the use of electron and ion beams for controlling the course of technological processes.
- Publication:
-
NASA STI/Recon Technical Report N
- Pub Date:
- 1973
- Bibcode:
- 1973STIN...7510307D
- Keywords:
-
- Microelectronics;
- Technology Utilization;
- Alloying;
- Electron Beams;
- Ion Beams;
- Semiconductors (Materials);
- Thin Films;
- Electronics and Electrical Engineering