Nanoscale etching of microporous coatings for broadband antireflection coatings Yan, Hongwei ; Liu, Taixiang ; Yang, Ke ; Huang, Beichong ; Zhou, Guorui ; Jiang, Xiaodong ; Zhang, Zhuo ; Yan, Lianghong Abstract Publication: Thin Solid Films Pub Date: March 2020 DOI: 10.1016/j.tsf.2020.137858 Bibcode: 2020TSF...698m7858Y