Learning-based compressive sensing method for EUV lithographic source optimization Lin, Jiaxin ; Dong, Lisong ; Fan, Taian ; Ma, Xu ; Wei, Yayi ; Ye, Tianchun Abstract Publication: Optics Express Pub Date: August 2019 DOI: 10.1364/OE.27.022563 Bibcode: 2019OExpr..2722563L