Improvement of Spatial Resolution in Z Direction with Improved Energy Spread Measured using Aberration Corrected STEM with Cold Field Emission Gun
Abstract
- Publication:
-
Microscopy and Microanalysis
- Pub Date:
- August 2019
- DOI:
- 10.1017/S1431927619003301
- Bibcode:
- 2019MiMic..25S.514H