Physical processes in capillary- porous material and coating in HF plasma at decreased pressure
Abstract
When implementing the high-energy ions into an open pore and their movement from the material surface deep into a capillary-porous object, the ions are capable to tear both the strong covalent bindings and the numerous weak intermolecular bindings in the structure of capillary-porous material. In this connection, a combination of processes on suppression of kinetic energy, recombination of ions, release of the new charged particles occurs, which results in modification of internal pores’ surface in the capillary-porous material.
- Publication:
-
Journal of Physics Conference Series
- Pub Date:
- October 2019
- DOI:
- 10.1088/1742-6596/1328/1/012065
- Bibcode:
- 2019JPhCS1328a2065R