Test results for approval of the type of installation for reproduction of micro-flows of gases in vacuum
Abstract
The article presents data on the composition and principle of operation of the unit of reproduction of micro-flows of gases in vacuum, as well as the results of its tests for the purpose of type approval on the state secondary (working) standard unit of gas flow in vacuum.
- Publication:
-
Journal of Physics Conference Series
- Pub Date:
- September 2019
- DOI:
- 10.1088/1742-6596/1313/1/012032
- Bibcode:
- 2019JPhCS1313a2032K