Numerical Simulation of Plasma Kinetics in a Low-Pressure Inductively Coupled Discharge in Argon and Mercury Mixtures
Abstract
- Publication:
-
IEEE Transactions on Plasma Science
- Pub Date:
- January 2019
- DOI:
- 10.1109/TPS.2018.2871258
- Bibcode:
- 2019ITPS...47..162B