Illumination uniformity improvement in digital micromirror device based scanning photolithography system Xiong, Zheng ; Liu, Hua ; Chen, Ronghuan ; Xu, Jia ; Li, Qiankun ; Li, Jinhuan ; Zhang, Wenjuan Abstract Publication: Optics Express Pub Date: July 2018 DOI: 10.1364/OE.26.018597 Bibcode: 2018OExpr..2618597X