Strain Characterization of Advanced CMOS Transistors: An Industry Perspective Zhang, Jiong ; Weng, Xiaojun ; Yuan, Renliang ; Pan, Ling ; Li, Han ; Kuhn, Markus ; Johnson, Kevin ; Zuo, Jian-Min ; Ma, Zhiyong Abstract Publication: Microscopy and Microanalysis Pub Date: August 2018 DOI: 10.1017/S1431927618005366 Bibcode: 2018MiMic..24S.974Z