Discharge and Plasma Characteristics of Pulse-Enhanced Vacuum Arc Evaporation (PEVAE) for Titanium Cathode
Abstract
- Publication:
-
IEEE Transactions on Plasma Science
- Pub Date:
- July 2018
- DOI:
- 10.1109/TPS.2018.2801333
- Bibcode:
- 2018ITPS...46.2619M