Nanocharacterization of 2D-Materials by Microwave Microscopy

Scanning Microwave Impedance Microscopy (SMIM) is a high-throughput non-destructive technique, which can be used for characterization of 2D-Materials (2DMs) with sub-micrometer resolution as well as for device inspection. Here we show SMIM data on 2DM samples with various electronic properties, from metals to semiconductors. Simple physical models based on Transmission Line theory are proposed for analysis of SMIM response of 2DM samples. Both continuous layers and sample with the finite size islands will be discussed.

Samples for this paper were provided by The Pennsylvania State University 2DCC-MIP supported by NSF cooperative agreement DMR-1539916; SVR acknowledges NSF award ECCS-1509786.