Investigation of Ti 0.54 Al 0.46 /Ti 0.54 Al 0.46 N multilayer films deposited by reactive gas pulsing process by nano-indentation and electron energy-loss spectroscopy
Abstract
- Publication:
-
Thin Solid Films
- Pub Date:
- July 2017
- DOI:
- 10.1016/j.tsf.2017.05.015
- Bibcode:
- 2017TSF...634...96P