Evaluating inner surface roughness of inline/picoliter fiber optic spectrometer fabricated by an NUV femtosecond laser drilling

We have evaluated inner surface roughness of inline/picoliter fiber optic spectrometer fabricated by an NUV femtosecond laser drilling. A microhole fabricated by the femtosecond laser without breaking off works as inline/picoliter fiber optic spectrometer. The attractive feature of the spectrometer is very small sensing volume which has several tens of picoliter. A second harmonic 400 nm femtosecond laser with 350 fs pulse duration launched onto the glass fiber optic. A high aspect ratio of the microhole was fabricated after 1000 pulse shots, but there was inner surface roughness. Although the repetition rate was changed 10 to 1000 Hz in order to control the inner surface roughness, the inner surface roughness was occurred in each case. It was confirmed that ablated fused silica particles deposited on the inner surface of microhole. The depth of microhole was deepened with 1 kHz of repetition rate and number of 1000 shots. In comparison to 10 Hz, the depth of microhole was increased by approximately 80%. It was assumed that heat accumulation effect enlarged the length of drilling. In order to minimize inner surface roughness, the best method is to use low number laser shots. After 100 pulse shots with 30 μJ of pulse energy, an optical inner surface quality of microhole was acquired. The optical inner surface quality of microhole was verified by measuring the transmittance of 94% of infrared light emission launched from superluminescent diode in the case of 100 pulse shots with 20 μJ. The transmittance decreased to 52% changing the microhole fabricated by 30 μJ with 100 laser shots because of increasing interaction area between the microhole and propagating light.