Piezo-based, high dynamic range, wide bandwidth steering system for optical applications
Abstract
Piezoelectric motors and actuators are characterized by direct drive, fast response, high positioning resolution and high mechanical power density. These properties are beneficial for optical devices such as gimbals, optical image stabilizers and mirror angular positioners. The range of applications includes sensor pointing systems, image stabilization, laser steering and more. This paper reports on the construction, properties and operation of three types of piezo based building blocks for optical steering applications: a small gimbal and a two-axis OIS (Optical Image Stabilization) mechanism, both based on piezoelectric motors, and a flexure-assisted piezoelectric actuator for mirror angular positioning. The gimbal weighs less than 190 grams, has a wide angular span (solid angle of > 2π) and allows for a 80 micro-radian stabilization with a stabilization frequency up to 25 Hz. The OIS is an X-Y, closed loop, platform having a lateral positioning resolution better than 1 μm, a stabilization frequency up to 25 Hz and a travel of +/-2 mm. It is used for laser steering or positioning of the image sensor, based on signals from a MEMS Gyro sensor. The actuator mirror positioner is based on three piezoelectric actuation axes for tip tilt (each providing a 50 μm motion range), has a positioning resolution of 10 nm and is capable of a 1000 Hz response. A combination of the gimbal with the mirror positioner or the OIS stage is explored by simulations, indicating a <10 micro-radian stabilization capability under substantial perturbation. Simulations and experimental results are presented for a combined device facilitating both wide steering angle range and bandwidth.
- Publication:
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Society of Photo-Optical Instrumentation Engineers (SPIE) Conference Series
- Pub Date:
- May 2017
- DOI:
- 10.1117/12.2262620
- Bibcode:
- 2017SPIE10190E..1CK