Ion current density distribution in a pulsed non-self-sustained glow discharge with a large hollow cathode
Abstract
The paper reports on azimuthal and radial distributions of the ion saturation current density measured with a single cylindrical and a plane probe in the plasma of a low-pressure (≈1 Pa) pulsed non-self-sustained glow discharge with a large (0.21 m3) hollow cathode at discharge currents higher than 100 A. It is shown that increasing the discharge operating voltage and decreasing the operating pressure in the range 0.4-1 Pa improves the uniformity of the ion current density distribution.
- Publication:
-
Journal of Physics Conference Series
- Pub Date:
- November 2017
- DOI:
- 10.1088/1742-6596/927/1/012014
- Bibcode:
- 2017JPhCS.927a2014D