Fabrication and Characterization of Bi2Te3-Based Chip-Scale Thermoelectric Energy Harvesting Devices
Abstract
Thermoelectric energy harvesters convert otherwise wasted heat into electrical energy. As a result, they have the potential to play a critical role in the autonomous wireless sensor network signal chain. In this paper, we present work carried out on the development of Bi2Te3-based thermoelectric chip-scale energy harvesting devices. Process flow, device demonstration and characterization are highlighted.
- Publication:
-
Journal of Electronic Materials
- Pub Date:
- May 2017
- DOI:
- 10.1007/s11664-016-4992-5
- Bibcode:
- 2017JEMat..46.2844C
- Keywords:
-
- Thermoelectric;
- thin film;
- semiconductors;
- microfabrication