Patterned wafer geometry (PWG) metrology for improving process-induced overlay and focus problems
Abstract
Prime silicon wafers are ideal substrates for lithographic patterning, with tight flatness specifications for focus control. Process engineers are painfully aware that in-process product wafers can substantially depart from this ideal substrate. Wafer processing can induce non-flatness leading to focus problems, or distort the wafer leading to overlay issues. Thus processes from outside the lithography sector can impact yield by ruining lithographic pattern quality. Double-sided optical interferometric metrology is the standard method to assess the flatness of blank silicon wafers. In the last several years, a similar Patterned Wafer Geometry (PWG) metrology tool is able to measure in-process patterned wafers. The apparent surface seen by an interferometer may be different than the true surface due to transparent thin films, a discrepancy that we call "false topography". Modeling results will demonstrate the use of a thin opaque film to reduce the problem. PWG metrology offers compelling advantages for the practical investigation of process-induced focus and overlay problems. The paper will include several examples of process learning from PWG metrology.
- Publication:
-
Optical Microlithography XXIX
- Pub Date:
- March 2016
- DOI:
- 10.1117/12.2218630
- Bibcode:
- 2016SPIE.9780E..0WB