Patterned Wafer Inspection with Multi-beam SEM Technology Thiel, Brad ; Mukhtar, Maseeh ; Quoi, Kathy ; Bunday, Benjamin D. ; Malloy, Matt Abstract Publication: Microscopy and Microanalysis Pub Date: July 2016 DOI: 10.1017/S1431927616003780 Bibcode: 2016MiMic..22S.586T