Decomposition of carbon dioxide using inductively coupled plasma

Decomposition of carbon dioxide is studied in Ar/CO₂ mixture inductively coupled plasmas (ICP). To measure decomposition rate of CO₂ , optical emission actinometry is used. When the ICP power or mixing ratio is changed, the decomposition rate is evolved depending on the discharge mode. This result is deeply analyzed with both the measurement of the plasma parameters, such as plasma density, electron temperature, and electron energy distribution and the calculation of rate constants for the CO₂ plasma.