Deterministic sub-micron 2D grating structures on steel by UV-fs-laser interference patterning
Abstract
Large area linear and crossed grating structures on steel surfaces are obtained by UV-femtosecond-laser ablation at 248 nm. High resolution on large areas is secured using a beam delivery system based on a two-grating interferometer. Thus, deterministic gratings with periods down to 330 nm and modulation depths of more than 100 nm are fabricated on tool steel and stainless steel. Areas of up to
- Publication:
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Applied Physics A: Materials Science & Processing
- Pub Date:
- January 2014
- DOI:
- 10.1007/s00339-013-8083-7
- Bibcode:
- 2014ApPhA.114...69B
- Keywords:
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- Modulation Depth;
- Cylindrical Lens;
- Nanosecond Laser;
- Focal Line;
- Grating Pattern