Enhanced piezoelectric properties of lead-free 0.935(Bi0.5Na0.5)TiO3-0.065BaTiO3 thin films fabricated by using pulsed laser deposition
Abstract
0.935(Bi0.5Na0.5)TiO3-0.065BaTiO3 (BNT-BT) thin films have been grown on Pt(111)/Ti/SiO2/Si substrates by using a pulsed laser deposition method. Deposition conditions of oxygen pressure and deposition temperature were changed. The BNT-BT thin film deposited at 750 °C and 300 mTorr exhibited a slim hysteresis loop with a remnant polarization (2 P r ) of 11 µC/cm2 and a low leakage current density of 7.3 × 10-5 A/cm2 at 98 kV/cm. The piezoelectric responses of the thin films were investigated using piezoelectric force microscopy with a lock-in amplifier. The thin films exhibited piezoelectric properties with a d 33, f value of 168 pm/V.
- Publication:
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Journal of Korean Physical Society
- Pub Date:
- April 2013
- DOI:
- 10.3938/jkps.62.1031
- Bibcode:
- 2013JKPS...62.1031P