Radiative Properties and Conversion Efficiency of Sn Plasma at 13.5 nm
Abstract
There is increasing interest in high-power extreme-ultraviolet (EUV) laser-based lamps operating in the region of 13.5 nm based on the Mo/Si multilayer mirrors for manufacturing the next generation of microelectronics. The net emission of Sn plasma at 13.5 nm is controlled by plasma opacity, hence for obtaining the highest conversion efficiency (CE), a mass-limited Sn droplet irradiated with either a solid-state laser or double laser pulse irradiation scheme are considered to be promising methods. To investigate radiative properties of Sn plasma a detailed multilevel non-LTE atomic model for all tin ions is developed. Experimental spectra are presented together with analysis based on calculations using the FAC and HULLAC codes. We will present the optimum regions for CE of mass-limited Sn droplet in conditions relevant to laser-based EUV sources against droplet size (density) and laser parameters including pulse shape by means of 1D hydrodynamic coupled to a developed population kinetics codes. We discuss in detailed predictions by comparing calculations to our experimental results.
- Publication:
-
APS Division of Plasma Physics Meeting Abstracts
- Pub Date:
- October 2013
- Bibcode:
- 2013APS..DPPCO5001M