Studies on the residual stress of fluorine-doped SnO2 film deposited by chemical vapor deposition Yang, Jingkai ; Zhao, Hongli ; Chen, Qian ; Liu, Shengbo ; Sha, Hesong ; Zhang, Fucheng Abstract Publication: Thin Solid Films Pub Date: June 2012 DOI: 10.1016/j.tsf.2012.04.032 Bibcode: 2012TSF...520.5691Y