In-situ analyses on the reactive sputtering process to deposit Al-doped ZnO films using an Al-Zn alloy target
Abstract
- Publication:
-
Thin Solid Films
- Pub Date:
- March 2012
- DOI:
- 10.1016/j.tsf.2011.08.031
- Bibcode:
- 2012TSF...520.3751T