A theoretical study on initial growth mechanism of ZrO2 film using cyclopentadienyl-type precursor Ren, Jie ; Cui, Chengxing ; Zhou, Guangfen ; Liu, Yanchun ; Hu, Yongqi ; Wang, Baozhu Abstract Publication: Thin Solid Films Pub Date: March 2011 DOI: 10.1016/j.tsf.2011.01.278 Bibcode: 2011TSF...519.3716R