Nb Thin Films Fabricated by Magnetic Field Distribution Variable-type Facing Target Sputtering System
Abstract
Nb Thin Films Fabricated by Magnetic Field Distribution Variable-type Facing Target Sputtering System
- Publication:
-
Journal of the Vacuum Society of Japan
- Pub Date:
- 2011
- DOI:
- 10.3131/jvsj2.54.181
- Bibcode:
- 2011JVSJ...54..181M