AlGaN/GaN-based MEMS with two-dimensional electron gas for novel sensor applications Niebelschütz, F. ; Cimalla, V. ; Tonisch, K. ; Haupt, Ch. ; Brückner, K. ; Stephan, R. ; Hein, M. ; Ambacher, O. Abstract Publication: Physica Status Solidi C Current Topics Pub Date: May 2008 DOI: 10.1002/pssc.200778424 Bibcode: 2008PSSCR...5.1914N