Hyper Piezoelectric Nano-Electromechanical Systems

Piezoelectric materials are extremely important for applications in micro-electromechanical systems (MEMS) and nano-electromechanical systems (NEMS). Here, we will be presenting PMN-PT (Lead Magnesium Niobate-Lead Titanate) on SOI as a hyper piezoelectric material for NEMS devices. The main advantages are the extremely high piezoelectric coefficient, higher electromechanical coupling, and larger attainable bandwidth. This will lead to enhanced agility of NEMS/MEMS devices and lower energy consumption. The work will also have considerable impact for nanoscale mechanics.