Polycrystalline Silicon Carbide Film Depositon Using Monomethylsilane and Hydrogen Chloride Gases Habuka, Hitoshi ; Watanabe, Mayuka ; Nishida, Mikiya ; Sekiguchi, Takashi Abstract Publication: ECS Transactions Pub Date: April 2007 DOI: 10.1149/1.2731173 Bibcode: 2007ECSTr...6b..69H