Self-organized nanodot formation on InP(1 0 0) by oxygen ion sputtering
Abstract
We demonstrate the formation of ordered nanodot chains with dot size less than 100 nm by 1 keV O2+ beam sputtering on InP(1 0 0). The ordered nanodot chains are perpendicularly aligned to the ion beam direction, and are formed at 38° and 44° incidence with ion current density of 100 μA cm -2. At 56° and 62° incidence, the nanodot chains formed are shorter and more coarse, and the periodicity of the nanodot chains is suppressed. XPS analysis show that the surface of nanodots formed comprise In 2O 3 and various InP oxides; and is In 2O 3-rich due to the preferential sputtering of P atoms.
- Publication:
-
Nuclear Instruments and Methods in Physics Research B
- Pub Date:
- July 2006
- DOI:
- 10.1016/j.nimb.2006.03.170
- Bibcode:
- 2006NIMPB.248...83T
- Keywords:
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- 79.20.Rf;
- 81.16.Dn;
- Atomic molecular and ion beam impact and interactions with surfaces;
- Self-assembly