プラズマコーティソグ初期段階のTiN, TiCNおよびTiC薄膜の集合組織; プラズマコーティソグ初期段階のTiN, TiCNおよびTiC薄膜の集合組織; Texture Formation of TiN, TiCN and TiC Films at Incipient Stage during Plasma Coating.
Abstract
- Publication:
-
Journal of the Vacuum Society of Japan
- Pub Date:
- 2002
- DOI:
- 10.3131/jvsj.45.468
- Bibcode:
- 2002JVSJ...45..468I