A comprehensive study of indium implantation-induced damage in deep submicrometer nMOSFET: device characterization and damage assessment
Abstract
- Publication:
-
IEEE Transactions on Electron Devices
- Pub Date:
- December 2002
- DOI:
- 10.1109/TED.2002.805610
- Bibcode:
- 2002ITED...49.2254L