Simulation of Transients in Plasma Processing Reactors Using Moderate Parallelism
Abstract
Quantifying transient phenomena in plasma processing, such as startup, shutdown, recipe changes or pulsed operation, are important to optimizing plasma and materials properties. These long term phenomena are difficult to resolve in multi-dimensional plasma equipment models due to the large computational burden. Hybrid models, which sequentially execute modules, may not be adequate to resolve the physics of transients. In this paper, we describe a new numerical technique in which a moderately parallel implementation of a hybrid plasma equipment model is used to address long term transients. In this implementation, the Electromagnetics Module (EMM), Electron Energy Transport Module (EETM) and the Fluid Kinetics Module (FKM) of the Hybrid Plasma Equipment Model are executed in parallel. Rate coefficients are continuously updated in EETM and are immediately available in shared memory for FKM. Electric fields from the EMM and FKM are, likewise, continuously updated and are immediately available for the EETM. Results will be discussed for 2-dimensional plasma properties during transients and pulses in low pressure inductively coupled plasmas for etching.
- Publication:
-
APS Annual Gaseous Electronics Meeting Abstracts
- Pub Date:
- October 2000
- Bibcode:
- 2000APS..GECCT2007S