Plasma Production and Wave Propagation in a Plasma Source Using Lower Hybrid Waves
Abstract
The lower hybrid wave, which is in the same frequency range as the helicon wave, is resonant at the lower hybrid frequency and does notpenetrate into the higher density side of the plasma. This creates thelocalized ionization region at the outer plasma radii and leads to uniformplasma production. Typical plasma densities in the plasma sourcedesigned to take advantage of this characteristic of the lower hybrid wave are of the order of1011cm-3 in the source region for 10 mTorr He and 1 kW radiofrequency (rf) power. The radial density profile can be controlled bychanging the location of the lower hybrid resonance by changing the magnetic field B0. We measured the radial dependence of rf electric and magnetic fields to determine iflower hybrid wave and helicon wave were present.
- Publication:
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Japanese Journal of Applied Physics
- Pub Date:
- July 1999
- DOI:
- 10.1143/JJAP.38.4351
- Bibcode:
- 1999JaJAP..38.4351K