Design of 60 Bar Silicon Micromachined Piezoresistive Pressure Sensor Seshamani, Ramani ; Islam, Rafiqul ; Saha, Ivan ; Kanakaraju, K. ; Jain, Y. K. ; Alex, T. K. Abstract Publication: Physics of Semiconductor Devices Pub Date: 1998 Bibcode: 1998SPIE.3316..521S