Electrical and Structural Properties of Rapid Thermal Annealed Amorphous Silicon Carbide Films
Abstract
Available from http://www3.interscience.wiley.com/cgi- bin/abstract/40001046/START
- Publication:
-
Physica Status Solidi Applied Research
- Pub Date:
- 1998
- DOI:
- 10.1002/(SICI)1521-396X(199809)169:1<67::AID-PSSA67>3.0.CO;2-H
- Bibcode:
- 1998PSSAR.169...67C