Fabrication of High-Resolution Fresnel Zone Plates by a Single Layer Resist Process Hiroshima, Hiroshi ; Komuro, Masanori ; Gentili, Massimo ; Grella, Luca ; Fabrizio, Enzo Di ; Maggiora, Romano Abstract Publication: Japanese Journal of Applied Physics Pub Date: December 1996 DOI: 10.1143/JJAP.35.6447 Bibcode: 1996JaJAP..35.6447H